5 Z piezo sensitivity (nm/Vp): 6.79
6 Z piezo gain (Vp/Vo): 20
7 X piezo sensitivity (nm/Vp): 34.0
8 X piezo gain (Vp/Vo): 20
9 X piezo position (nm): 1165.55123217
12 Setpoint (V): 1.44380865187
22 Unfold rate (nm/s): 154.852736536
23 Sample rate (Hz): 3097.05473072
25 Data fields: Z_piezo_out Deflection_in Z_piezo_in