5 Z piezo sensitivity (nm/Vp): 6.79
6 Z piezo gain (Vp/Vo): 20
7 X piezo sensitivity (nm/Vp): 34.0
8 X piezo gain (Vp/Vo): 20
9 X piezo position (nm): 1110.76523995
12 Setpoint (V): 1.54757000076
22 Unfold rate (nm/s): 92.8317766723
23 Sample rate (Hz): 1856.63553345
25 Data fields: Z_piezo_out Deflection_in Z_piezo_in