5 Z piezo sensitivity (nm/Vp): 6.79
6 Z piezo gain (Vp/Vo): 20
7 X piezo sensitivity (nm/Vp): 34.0
8 X piezo gain (Vp/Vo): 20
9 X piezo position (nm): 1080.88197147
12 Setpoint (V): 1.62264438849
22 Unfold rate (nm/s): 718.762732761
23 Sample rate (Hz): 14375.2546552
25 Data fields: Z_piezo_out Deflection_in Z_piezo_in