mirror no additional equipment is required since the fixed
wavelength of the laser diode is used as a calibration
standard. The calibration is appliable in the range between
- several ten nm and several μm. Besides vertical calibration many
- problems of piezo elements like hysteresis, nonlinearity, creep,
- derating, etc. and their dependence on scan parameters or
+ several ten nm and several $\mu$m. Besides vertical calibration
+ many problems of piezo elements like hysteresis, nonlinearity,
+ creep, derating, etc. and their dependence on scan parameters or
temperature can be investigated.},
}